Michael A. Filler
School of Chemical & Biomolecular Engineering
Georgia Institute of Technology
Abstract: Processes for Hyper-scalable Nanoelectronics
This talk will overview our work toward the modularization and hyper-scalable manufacturing of high-performance nanoelectronic devices. Colloidal dispersions of entirely prefabricated, plug-and-play devices are promising “feedstocks” for future electronic technologies ranging from desktop-printed integrated circuits to aerosolizable wireless sensor nodes. To this end, we are developing a suite of new bottom-up nanomanufacturing processes. The vapor-liquid-solid (VLS) mechanism is central to our methodology, allowing for the direct growth and nanoscale compositional encoding of single-crystalline semiconductor materials. A newly developed bottom-up patterning process – Selective CoAxial Lithography via Etching of Surfaces (SCALES) – leverages the chemical differences between encoded nanowire segments to yield surface masks with nanoscale precision. Such masks can subsequently direct the selective deposition of the thin films needed to complete device construction. In the Geode process, we use an unconventional substrate – the interior surface of hollow silica microcapsules – to increase the manufacturing throughput of nanowires by orders-of-magnitude. These and related processes constitute a powerful platform with which to fabricate and deploy semiconductor devices and systems in a variety of new situations.
Biography of Michael Filler
Dr. Filler is an Associate Professor in the School of Chemical and Biomolecular Engineering and, by courtesy, in the School Materials Science and Engineering at the Georgia Institute of Technology. His research program lies at the intersection of chemical engineering and materials science, focusing on the synthesis, understanding, and deployment of nanoscale materials for applications in electronics, photonics, and energy conversion. He is also the host of Nanovation, a monthly podcast about the intersection of nanoscience, technology, manufacturing, and society. Dr. Filler has been recognized for his research and teaching with the National Science Foundation CAREER Award, Georgia Tech Sigma Xi Young Faculty Award, and as a Camille and Henry Dreyfus Foundation Environmental Chemistry Mentor.